Designing Optically & Utilization of Thermopile Chip with Resonant Cavity Absorber Structure as IR Absorber

This paper presents a novel thermopile chip in which the resonant cavity structure was fully utilized as an absorber by optical design. The designed using Al anthe bottom reflective metal layer, air intermediate dielectric and SiO2/TiN/Si3N4 sandwich layers top absorption while (Al) deposited on cold junctions of thermopile. simulation calculation results show that with not only has great infrared wide range but also can effectively prevent from absorbing radiation inhibit rise temperature. As result, temperature difference between hot is increased, responsivity further improved. Moreover, duty cycle greatly improved due to double-layer suspension structure. Compared traditional structure, sizes be reduced maintaining specific detectivity.